Micro Electro Mechanical Systems (MEMS):
       Micro Electro Mechanical Systems is the integration of mechanical elements and electronic sensors using a single silicon chip. The two production techniques of this MEMS manufacturing technique are Bulk Micromachining and surface micromachining. This paper proposes the novel concept of integration of these two manufacturing techniques. The application of the rotary fan that is used in liquid flow chambers are discussed using this concept. The same concept is also applied to the micromirror and these are simulated in the Anisotropic Crystallibe Etching simulation (ACES).